Nonlinear optical properties of photoresists for projection lithography
نویسندگان
چکیده
Optical beams are self-focused and self-trapped upon initiating crosslinking in photoresists. This nonlinear optical phenomenon is apparent only for low average optical intensities and produces index of refraction changes as large as 0.04. We propose using the self-focusing and self-trapping phenomenon in projection photolithography to enhance the resolution and depth of focus. © 1996 American Institute of Physics. @S0003-6951~96!02003-0#
منابع مشابه
Beyond EUV lithography: a comparative study of efficient photoresists' performance
Extreme ultraviolet (EUV) lithography at 13.5 nm is the main candidate for patterning integrated circuits and reaching sub-10-nm resolution within the next decade. Should photon-based lithography still be used for patterning smaller feature sizes, beyond EUV (BEUV) lithography at 6.x nm wavelength is an option that could potentially meet the rigid demands of the semiconductor industry. We demon...
متن کاملModeling of EUV photoresists with a resist point spread function
Extreme ultraviolet (EUV) lithography is under development for possible deployment at the 32-nm technology node. One active area of research in this field is the development of photoresists that can meet the stringent requirements (high resolution, high sensitivity, low LER, etc.) of lithography in this regime. In order to facilitate research in this and other areas related to EUV lithography, ...
متن کامل3D Structuring in Nanotechnology
The operating principle of the new lithography process, which is suitable for all commercially available photoresists, is easily understood: Ultrashort laser pulses are strongly focused into the material, which is then exposed by means of a nonlinear optical process in the focal point. Like a pen that is moved in three dimensions, the laser beam writes on the material following arbitrary paths....
متن کاملOptical Limiting Properties of Colloids Enhanced by Gold Nanoparticles Based on Nonlinear Refraction for Cw Laser Illumination
In this work, thermo-optical properties of gold nanoparticle colloids are studied using continuous wave (CW) laser irradiation at 532 nm. The nanoparticle colloids are fabricated by 18 ns pulsed laser ablation of pure gold plate in the distilled water. The formation of the nanoparticles has been evidenced by optical absorption spectra and transmission electron microscopy. The nonlinear optical ...
متن کاملPump-probe spectroscopy on photoinitiators for stimulated-emission-depletion optical lithography.
We report on femtosecond pump-probe experiments on two different photoinitiators in solution. These two molecules have recently appeared as attractive candidates for far-field optical lithography based on stimulated-emission-depletion (STED) inspired approaches aiming at beating Abbe's diffraction limit. For the case of 7-diethylamino-3-thenoylcoumarin (DETC), we find that stimulated emission c...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 1996